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Lecturer(s)
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Course content
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Thin film properties Structure and composition Roentgen spectroscopy Electron microprobe Raman spectroscopy SIMS GDOES RBS XPS
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Learning activities and teaching methods
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Monologic Lecture(Interpretation, Training), Dialogic Lecture (Discussion, Dialog, Brainstorming), Work with Text (with Book, Textbook)
- Preparation for the Exam
- 600 hours per semester
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Learning outcomes
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The aim is to acquaint students with thin film characterization.
Knowledge. List methods used for thin films characterization. Define application possibilities of individual methods. Identify drawbacks of individual methods and possible errors of thin film determination.
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Prerequisites
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Basic knowledge of the undergraduate physics.
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Assessment methods and criteria
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Oral exam
Knowledge of subject matter.
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Recommended literature
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Eckertová, L. a kol. (1992). Fyzikální elektronika pevných látek. Karolinum Praha.
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Kittel, Ch. (1985). Úvod do fyziky pevných látek. Academia Praha.
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